JPS6310059U - - Google Patents
Info
- Publication number
- JPS6310059U JPS6310059U JP1986103929U JP10392986U JPS6310059U JP S6310059 U JPS6310059 U JP S6310059U JP 1986103929 U JP1986103929 U JP 1986103929U JP 10392986 U JP10392986 U JP 10392986U JP S6310059 U JPS6310059 U JP S6310059U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- polishing jig
- replacement
- template
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 235000012431 wafers Nutrition 0.000 claims 6
- 230000003014 reinforcing effect Effects 0.000 claims 2
- 229920003002 synthetic resin Polymers 0.000 claims 2
- 239000000057 synthetic resin Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986103929U JPS6310059U (en]) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986103929U JPS6310059U (en]) | 1986-07-07 | 1986-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310059U true JPS6310059U (en]) | 1988-01-22 |
Family
ID=30976944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986103929U Pending JPS6310059U (en]) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310059U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018144222A (ja) * | 2016-03-03 | 2018-09-20 | ピー・アール・ホフマン・マシン・プロダクツ・インコーポレイテッド | 研磨機用ウエハホルダ |
| US11759910B1 (en) | 2016-03-03 | 2023-09-19 | P. R. Hoffman Machine Products, Inc. | Method of manufacturing wafer holder |
-
1986
- 1986-07-07 JP JP1986103929U patent/JPS6310059U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018144222A (ja) * | 2016-03-03 | 2018-09-20 | ピー・アール・ホフマン・マシン・プロダクツ・インコーポレイテッド | 研磨機用ウエハホルダ |
| JP2020097107A (ja) * | 2016-03-03 | 2020-06-25 | ピー・アール・ホフマン・マシン・プロダクツ・インコーポレイテッド | 研磨機用ウエハホルダ及びウエハホルダを製造する方法 |
| US11759910B1 (en) | 2016-03-03 | 2023-09-19 | P. R. Hoffman Machine Products, Inc. | Method of manufacturing wafer holder |